7.13 Metaln (where n = 1 to 5)¶
RULE NO. |
DESCRIPTION |
LAYOUT RULE |
Layer |
Mn — Metaln (where n = 1 to 5) |
|
Mn.1 |
Width |
0.23 (n = 1) 0.28 (2 <= n <= 5) |
Mn.2a |
Space |
0.23 (n = 1) 0.28 (2 <= n <= 5) |
Mn.2b |
Space to wide Metaln (length & width > 10μm) |
0.3 |
Mn.3 |
Minimum Metaln area |
0.1444 um2 |
Mn.4 |
Metaln coverage over the entire die shall be >30% (Refer to section 13.0 for Dummy Metal fill guidelines. Customer needs to ensure enough dummy metal to satisfy Metaln coverage) |
