7.14 Vian (where n = 1 to 5)

Vian RULES

RULE NO.	DESCRIPTION	LAYOUT RULE
Layer	Vn — Vian (where n = 1 to 5)
Vn.1	Min/max Vian size (1 <= n <= 5)	0.26
Vn.2a	Space (1 <= n <= 5)	0.26
Vn.2b	Vian Space in 4x4 or larger Vian array	0.36
Vn.3	Metaln (where n=1 to 5) overlap of Vian Metaln (< 0.34μm) end-of-line overlap (1) If Metaln overlap Vian by < 0.04μm on one side, adjacent Metaln edges overlap Minimum Metaln overlap of Vian on all sides for minimum Vian resistance variation (guideline)*	0.00 (n = 1) 0.01 (2 <= n <= 5) 0.06 0.06 0.12
Vn.4	Metal [n+1] overlap of Vian Metal [n+1] (< 0.34μm) end-of-line overlap1 If Metal [n+1] overlap Vian by < 0.04μm on one side, adjacent Metal [n+1] edges overlap Minimum Metal[n+1] overlap of Vian on all sides for minimum Vian resistance variation (guideline)*	0.01 0.06 0.06 0.12
Vn.5*	Vian stack (2) over contact is permitted

Note

* Appendix B: Rules not coded

Note

1. Applies to all < 0.34μm wide Metal lines, excluding Metal branches shorter than 0.28μm.

2. Vian is stacked if any portion of it intersects Via [n+1] or Via [n-1], or contact if n=1.

3. For better yield and reliability try to avoid single vias on any layer (put multiple).