7.15 MetalTop (Thickness 6K/9K*/11K* Å)¶
RULE NO. |
DESCRIPTION |
LAYOUT RULE |
Layer |
MT — MetalTop |
|
MT.1 |
Width |
0.36/0.44* |
MT.2a |
Space |
0.38/0.46* |
MT.2b |
Space between wide (length & width > 10um) MetalTop |
0.50/0.60* |
MT.3 |
MetalTop coverage over the entire die shall be >30% (Refer to section 10.3 for Dummy Metal-fill guidelines. Customer needs to ensure enough dummy metal to satisfy Metaln coverage) |
|
MT.4 |
Minimum MetalTop area |
0.5625μm2 |
Note
* For 9K/11K Å MetalTop.
